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SiC Super K for RTP

SiC Super K for RTP

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Detailed Description

SiC Super K for RTP Application


The microstructure designed SiC《Super K》is the best material of carrier for carrying

wafers in the rapid thermal process (RTP) of photoelectronic and compound

semiconductors. There are empirical performances in successfully heating up to

1250 ˚C at a rate of 60˚C/sec.

 

 

 

SiC Super K for RTP Feature requirements


1.Superior thermal shock resistance

2.Low thermal expansion coefficient

3.Good thermal conductivity

4.Good temperature uniformity

 

 

 

Why is Kallex better than others


1.Diversify in various specifications, also providing customized services.

2.High quality and fast delivery.