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SiC pin tray
SiC pin tray
Detailed Description
Application
SiC pin tray for ICP etching process in LED industry can replace the tray of usual
pocket types.
Feature requirements
1. Excellent thermal conductivity
2. Resistance to plasma bombardment
3. Good temperature uniformity
2. Resistance to plasma bombardment
3. Good temperature uniformity
Why is Kallex better than others
1. Exclusive patent design, obtained ROC patent certificate:
New No. M555559-New name: wafer carrier
2. Assist customers improvement in process
3. Highly cost-performance ratio and high competitive
4. Improve the homogeneity of each small partial area in the wafer
5. Reduce the difference of process results between wafers in the same carrier
6. Lasting life is quadruple than usual pocket types, which can greatly save the use cost
New No. M555559-New name: wafer carrier
2. Assist customers improvement in process
3. Highly cost-performance ratio and high competitive
4. Improve the homogeneity of each small partial area in the wafer
5. Reduce the difference of process results between wafers in the same carrier
6. Lasting life is quadruple than usual pocket types, which can greatly save the use cost
of the plate