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SiC plate for RTA
SiC plate for RTA
Detailed Description
SiC plate for RTA Application
SiC plate is widely used as a wafer holder in the RTA (rapid thermal annealing) process
in LED and semiconductor industries.
SiC plate for RTA Feature requirements
1. Good thermal conductivity
2. Good thermal shock resistance
3. Low coefficient of thermal expansion
4. Good temperature uniformity
2. Good thermal shock resistance
3. Low coefficient of thermal expansion
4. Good temperature uniformity
Why is Kallex better than others
1. Available in various specifications, also providing customized services
2. High quality and fast delivery
3. OEM and ODM
2. High quality and fast delivery
3. OEM and ODM