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SiC dummy wafer

SiC dummy wafer

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Detailed Description
SiC dummy wafer Application

SiC dummy wafers are used in the front to protect regular Si wafers in diffusion process. 
 
 
SiC dummy wafer Feature requirements

1. Excellent resistance to high temperature gas attack 
2. Good chemical stability 
3. Easy to clean surface, without particle issue
4. Not easy to bend and deform for long-term use
 
 
Why is Kallex better than others

1. Customized services 
2. Long lasting life, reducing the frequency of wafer replacements
3. Various types and suitable for each equipment