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SiC cover plate
SiC cover plate
Detailed Description
Feature requirements
Why is Kallex better than others
Application
SiC cover plate is used as a holder during Si wafer thin film growth process
in semiconductor industry.
Feature requirements
1. High thermal conductivity and surface temperature uniformity
2. Good thermal shock resistance and thermal strain resistance
3. Easy to clean surface, without particle issue
4. Coating process has good stability
2. Good thermal shock resistance and thermal strain resistance
3. Easy to clean surface, without particle issue
4. Coating process has good stability
Why is Kallex better than others
1. Customized services
2. All kinds of types and suitable for each equipment
3. High quality and fast delivery
2. All kinds of types and suitable for each equipment
3. High quality and fast delivery